Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043377 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2021-06-22 |
| 11027970 | Method of manufacturing semiconductor device | Naofumi Ohashi | 2021-06-08 |
| 11028473 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto | 2021-06-08 |
| 10964531 | Method of manufacturing semiconductor device by supplying gas | Takashi Nakagawa, Naofumi Ohashi, Tadashi Takasaki | 2021-03-30 |