Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145505 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Takashi Yahata, Naofumi Ohashi | 2021-10-12 |
| 11028473 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose | 2021-06-08 |