Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145505 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Naofumi Ohashi, Ryuji Yamamoto | 2021-10-12 |
| 11104995 | Substrate processing apparatus | Satoshi Takano, Kazuyuki Toyoda, Naofumi Ohashi, Tadashi Takasaki | 2021-08-31 |
| 10914005 | Substrate processing apparatus having gas guide capable of suppressing gas diffusion | — | 2021-02-09 |