Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11104995 | Substrate processing apparatus | Takashi Yahata, Satoshi Takano, Naofumi Ohashi, Tadashi Takasaki | 2021-08-31 |
| 10943806 | Substrate processing apparatus, method of manufacturing semiconductor device, and non- transitory computer-readable recording medium | Kazuhiro Yuasa, Tetsuo Yamamoto | 2021-03-09 |