Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Tetsuo Yamamoto, Yoshihiko YANAGISAWA, Shinya Sasaki, Noriaki MICHITA | 2021-05-25 |
| 10943806 | Substrate processing apparatus, method of manufacturing semiconductor device, and non- transitory computer-readable recording medium | Kazuyuki Toyoda, Tetsuo Yamamoto | 2021-03-09 |