Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Kazuhiro Yuasa, Tetsuo Yamamoto, Yoshihiko YANAGISAWA, Shinya Sasaki | 2021-05-25 |