Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177143 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Takashi Nogami | 2021-11-16 |
| 11127608 | Heating element, substrate processing apparatus, and method of manufacturing semiconductor device | — | 2021-09-21 |
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Kazuhiro Yuasa, Tetsuo Yamamoto, Shinya Sasaki, Noriaki MICHITA | 2021-05-25 |