Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177143 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Yoshihiko YANAGISAWA | 2021-11-16 |
| 11062918 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama | 2021-07-13 |