Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D939459 | Boat for wafer processing apparatus | Hironori Shimada, Daigi KAMIMURA, Shuhei Saido, Takafumi Sasaki | 2021-12-28 |
| 11155920 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Takayuki Nakada | 2021-10-26 |
| 11124873 | Substrate processing apparatus | Takayuki Nakada, Kenji Shirako | 2021-09-21 |
| 11104997 | Substrate processing apparatus and method of manufacturing semiconductor device | Naoya Miyashita | 2021-08-31 |
| 11062918 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takashi Nogami | 2021-07-13 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Takayuki Nakada | 2021-03-16 |