Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D939459 | Boat for wafer processing apparatus | Hironori Shimada, Daigi KAMIMURA, Tomoshi Taniyama, Takafumi Sasaki | 2021-12-28 |
| D937385 | Return nozzle | Mitsunori Takeshita, Hidenari Yoshida, Yusaku OKAJIMA | 2021-11-30 |
| D928106 | Supporting column of insulation unit for semiconductor manufacturing apparatus | Yusaku OKAJIMA, Hidenari Yoshida | 2021-08-17 |
| D916037 | Cover of seal cap for reaction chamber for semiconductor | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2021-04-13 |
| 10961625 | Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Yusaku OKAJIMA | 2021-03-30 |
| 10923366 | Substrate processing apparatus and method of manufacturing semiconductor device | Yusaku OKAJIMA, Hidenari Yoshida, Takafumi Sasaki | 2021-02-16 |