Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D937385 | Return nozzle | Mitsunori Takeshita, Shuhei Saido, Hidenari Yoshida | 2021-11-30 |
| D928106 | Supporting column of insulation unit for semiconductor manufacturing apparatus | Shuhei Saido, Hidenari Yoshida | 2021-08-17 |
| D916037 | Cover of seal cap for reaction chamber for semiconductor | Shuhei Saido, Hidenari Yoshida, Takafumi Sasaki | 2021-04-13 |
| 10961625 | Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device | Shuhei Saido, Takafumi Sasaki, Hidenari Yoshida | 2021-03-30 |
| 10923366 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Hidenari Yoshida, Takafumi Sasaki | 2021-02-16 |