Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D937385 | Return nozzle | Mitsunori Takeshita, Shuhei Saido, Yusaku OKAJIMA | 2021-11-30 |
| 11155920 | Substrate processing apparatus, and method for manufacturing semiconductor device | Tomoshi Taniyama, Takayuki Nakada | 2021-10-26 |
| D928106 | Supporting column of insulation unit for semiconductor manufacturing apparatus | Yusaku OKAJIMA, Shuhei Saido | 2021-08-17 |
| 11001924 | Substrate processing apparatus, nozzle base, and manufacturing method for semiconductor device | — | 2021-05-11 |
| D916037 | Cover of seal cap for reaction chamber for semiconductor | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2021-04-13 |
| 10961625 | Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device | Shuhei Saido, Takafumi Sasaki, Yusaku OKAJIMA | 2021-03-30 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Shigeru Odake, Tomoshi Taniyama, Takayuki Nakada | 2021-03-16 |
| 10923366 | Substrate processing apparatus and method of manufacturing semiconductor device | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2021-02-16 |