Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D939459 | Boat for wafer processing apparatus | Hironori Shimada, Tomoshi Taniyama, Shuhei Saido, Takafumi Sasaki | 2021-12-28 |
| 11062918 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Takashi Nogami | 2021-07-13 |
| 11015248 | Substrate processing apparatus and method of manufacturing semiconductor device | Hironori Shimada | 2021-05-25 |
| 10998205 | Substrate processing apparatus and manufacturing method of semiconductor device | Tomoyasu Miyashita, Atsushi UMEKAWA | 2021-05-04 |