Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Shinobu Sugiura, Yosuke KUWATA, Atsushi UMEKAWA, Kazuhiro Kimura, Akihiko Hiratsuka +2 more | 2021-12-14 |
| 10998205 | Substrate processing apparatus and manufacturing method of semiconductor device | Daigi KAMIMURA, Atsushi UMEKAWA | 2021-05-04 |