Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Yosuke KUWATA, Tomoyasu Miyashita, Atsushi UMEKAWA, Kazuhiro Kimura, Akihiko Hiratsuka +2 more | 2021-12-14 |
| D918848 | Retainer of ceiling heater for semiconductor fabrication apparatus | Tetsuya Kosugi, Takatomo Yamaguchi | 2021-05-11 |