Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198935 | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device | Shinobu Sugiura, Yosuke KUWATA, Tomoyasu Miyashita, Atsushi UMEKAWA, Kazuhiro Kimura +2 more | 2021-12-14 |