Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049742 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Masaaki Ueno | 2021-06-29 |
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Hitoshi Murata, Masaaki Ueno | 2021-06-22 |
| D918848 | Retainer of ceiling heater for semiconductor fabrication apparatus | Shinobu Sugiura, Takatomo Yamaguchi | 2021-05-11 |