Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158529 | Method of manufacturing semiconductor device, method of controlling temperature and non-transitory computer-readable recording medium | Masashi Sugishita | 2021-10-26 |
| 11049742 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Tetsuya Kosugi, Masaaki Ueno | 2021-06-29 |