Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049742 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Tetsuya Kosugi | 2021-06-29 |
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Tetsuya Kosugi, Hitoshi Murata | 2021-06-22 |