Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2021-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043402 | Cooling unit, heat insulating structure, and substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2021-06-22 |