Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D939459 | Boat for wafer processing apparatus | Daigi KAMIMURA, Tomoshi Taniyama, Shuhei Saido, Takafumi Sasaki | 2021-12-28 |
| D924953 | Gas inlet attachment for substrate processing apparatus | — | 2021-07-13 |
| 11015248 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA | 2021-05-25 |