Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11104997 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama | 2021-08-31 |
| 10903098 | Substrate processing system and substrate processing apparatus | Akihiko Yoneda, Kazuhide Asai, Tetsuyuki MAEDA, Nobuyuki Miyakawa, Tadashi Okazaki +1 more | 2021-01-26 |