Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086304 | Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis | Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Hidemoto Hayashihara, Kayoko Yashiki, Hiroyuki Iwakura | 2021-08-10 |
| 10937676 | Substrate processing apparatus and device management controller | Hidemoto Hayashihara, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Hiroyuki Iwakura | 2021-03-02 |
| 10903098 | Substrate processing system and substrate processing apparatus | Akihiko Yoneda, Tetsuyuki MAEDA, Naoya Miyashita, Nobuyuki Miyakawa, Tadashi Okazaki +1 more | 2021-01-26 |