Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086304 | Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Hiroyuki Iwakura | 2021-08-10 |
| 10937676 | Substrate processing apparatus and device management controller | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Hiroyuki Iwakura | 2021-03-02 |