Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Naofumi Ohashi, Eisuke Nishitani, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |