Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11185939 | Wire electric discharge machining apparatus | Masashi Sakaguchi, Tsubasa Kuragaya | 2021-11-30 |
| 11072859 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2021-07-27 |
| 11037823 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi | 2021-06-15 |
| 10896810 | RF generating apparatus and plasma treatment apparatus | Yoshiyuki Oshida, Naoya Fujimoto, Norikazu Kato, Takeshi Okada | 2021-01-19 |