Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170996 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2021-11-09 |
| 11037823 | Method of manufacturing semiconductor device | Tsuyoshi Takeda, Naofumi Ohashi | 2021-06-15 |