Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170996 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Toshiyuki Kikuchi | 2021-11-09 |
| 11152215 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Motomu DEGAI, Kimihiko NAKATANI | 2021-10-19 |