Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152215 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kimihiko NAKATANI, Hiroshi Ashihara | 2021-10-19 |
| 11004676 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Arito OGAWA, Yukinao KAGA, Kazuhiro Harada | 2021-05-11 |