Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004676 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Yukinao KAGA, Kazuhiro Harada, Motomu DEGAI | 2021-05-11 |