Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031270 | Substrate processing apparatus, substrate holder and mounting tool | Atsushi Hirano, Yuji Takebayashi, Masanori Sakai, Masakazu Shimada | 2021-06-08 |
| 11004676 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Motomu DEGAI | 2021-05-11 |