Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11108969 | Shutter apparatus, imaging apparatus, control method of shutter apparatus, and storage medium | Kaishi Ohashi, Jumpei Ishibiki | 2021-08-31 |
| 11031270 | Substrate processing apparatus, substrate holder and mounting tool | Atsushi Hirano, Yuji Takebayashi, Yukinao KAGA, Masakazu Shimada | 2021-06-08 |