Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031270 | Substrate processing apparatus, substrate holder and mounting tool | Atsushi Hirano, Yukinao KAGA, Masanori Sakai, Masakazu Shimada | 2021-06-08 |
| 11020760 | Substrate processing apparatus and precursor gas nozzle | Toshiki Fujino, Yuma Fujii, Kazuki NONOMURA, Yoshinori Baba, Kenichi Suzaki | 2021-06-01 |