Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020760 | Substrate processing apparatus and precursor gas nozzle | Toshiki Fujino, Yuma Fujii, Kazuki NONOMURA, Yoshinori Baba, Yuji Takebayashi | 2021-06-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020760 | Substrate processing apparatus and precursor gas nozzle | Toshiki Fujino, Yuma Fujii, Kazuki NONOMURA, Yoshinori Baba, Yuji Takebayashi | 2021-06-01 |