Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Tadashi Terasaki, Masanori NAKAYAMA | 2021-10-26 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masaki Murobayashi, Hiroto IGAWA, Teruo Yoshino, Masanori NAKAYAMA | 2021-10-12 |
| 10989082 | Exhaust gas purification system | Tomoya Takizawa | 2021-04-27 |