Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155922 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2021-10-26 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Koichiro Harada, Hiroto IGAWA, Teruo Yoshino, Masanori NAKAYAMA | 2021-10-12 |