Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189483 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuichiro TAKESHIMA, Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA | 2021-11-30 |
| 11152476 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori NAKAYAMA, Yuichiro TAKESHIMA, Katsunori FUNAKI | 2021-10-19 |
| 11145491 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masaki Murobayashi, Koichiro Harada, Teruo Yoshino, Masanori NAKAYAMA | 2021-10-12 |
| 11081362 | Method of manufacturing semiconductor device, and recording medium | Yuki YAMAKADO, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA +2 more | 2021-08-03 |