Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183382 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI | 2021-11-23 |
| 11164741 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2021-11-02 |
| 11056337 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2021-07-06 |
| 10930491 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroki Yamashita, Katsuyoshi Harada | 2021-02-23 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |