Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11104992 | Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof | — | 2021-08-31 |
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Tatsuru Matsuoka, Kenji Kameda, Satoshi Shimamoto | 2021-08-17 |
| 10914940 | Scanning optical device | — | 2021-02-09 |