Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11033930 | Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition | Chang Ke, Song-Moon Suh, Liqi Wu, Lei Zhou, Biao Liu +3 more | 2021-06-15 |
| 10950433 | Methods for enhancing selectivity in SAM-based selective deposition | Chang Ke, Liqi Wu, Lei Zhou, Shuyi Zhang, David Thompson +3 more | 2021-03-16 |