Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11033930 | Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition | Chang Ke, Song-Moon Suh, Liqi Wu, Michael S. Jackson, Lei Zhou +3 more | 2021-06-15 |
| 10964527 | Residual removal | Jong Mun Kim, Biao Liu, Erica Chen, Chentsau Ying, Srinivas D. Nemani +1 more | 2021-03-30 |
| 10950433 | Methods for enhancing selectivity in SAM-based selective deposition | Chang Ke, Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang +3 more | 2021-03-16 |
| 10892161 | Enhanced selective deposition process | Biao Liu, Erica Chen, Srinivas D. Nemani, Chang Ke, Lei Zhou | 2021-01-12 |