Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195706 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, Michael C. Kellogg, John Holland, Kenneth Lucchesi +1 more | 2021-12-07 |
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | Alexander Matyushkin, John Holland, Harmeet Singh, Alexei Marakhtanov, Keith Gaff +1 more | 2021-07-20 |
| 11043361 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, James D. Carducci, Kenneth S. Collins, Shahid Rauf +3 more | 2021-06-22 |
| 10907008 | Highly functional epoxidized resins and coatings | Dean C. Webster, Partha Pratim Sengupta, Xiao-Dong Pan, Adlina Paramarta | 2021-02-02 |
| 10910195 | Substrate support with improved process uniformity | Fangli Hao, Yuehong Fu | 2021-02-02 |