Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195706 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, John Holland, Zhigang Chen, Kenneth Lucchesi +1 more | 2021-12-07 |
| 10914003 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Christopher Pena, John Daugherty | 2021-02-09 |