Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195706 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, Michael C. Kellogg, John Holland, Zhigang Chen +1 more | 2021-12-07 |
| 10916409 | Active control of radial etch uniformity | Alexei Marakhtanov, Felix Kozakevich, John Holland, Bing Ji | 2021-02-09 |