Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195706 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Michael C. Kellogg, John Holland, Zhigang Chen, Kenneth Lucchesi +1 more | 2021-12-07 |
| 11158488 | High speed synchronization of plasma source/bias power delivery | Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more | 2021-10-26 |
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | Alexander Matyushkin, John Holland, Harmeet Singh, Alexei Marakhtanov, Keith Gaff +1 more | 2021-07-20 |
| 11024532 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Keith Gaff | 2021-06-01 |
| 10916409 | Active control of radial etch uniformity | Alexei Marakhtanov, John Holland, Bing Ji, Kenneth Lucchesi | 2021-02-09 |