Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | Alexander Matyushkin, John Holland, Harmeet Singh, Alexei Marakhtanov, Zhigang Chen +1 more | 2021-07-20 |
| 11024532 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, Alexei Marakhtanov, John Holland, Felix Kozakevich | 2021-06-01 |
| 10923380 | Electrostatically clamped edge ring | Christopher Kimball, Feng Wang | 2021-02-16 |
| 10892197 | Edge seal configurations for a lower electrode assembly | Matthew Busche, Anthony J. Ricci, Henry Povolny, Scott Stevenot | 2021-01-12 |