Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133211 | Ceramic baseplate with channels having non-square corners | Eric A. Pape | 2021-09-28 |
| 10923380 | Electrostatically clamped edge ring | Christopher Kimball, Keith Gaff | 2021-02-16 |