Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133211 | Ceramic baseplate with channels having non-square corners | Feng Wang | 2021-09-28 |
| 10978323 | Substrate holder having integrated temperature measurement electrical devices | Darrell Ehrlich, Mike Jing | 2021-04-13 |