Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978323 | Substrate holder having integrated temperature measurement electrical devices | Eric A. Pape, Mike Jing | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978323 | Substrate holder having integrated temperature measurement electrical devices | Eric A. Pape, Mike Jing | 2021-04-13 |