Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101107 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Neil Benjamin, Anthony J. Ricci | 2021-08-24 |
| 10892179 | Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods | Neil Benjamin, Anthony J. Ricci | 2021-01-12 |
| 10892197 | Edge seal configurations for a lower electrode assembly | Keith Gaff, Matthew Busche, Anthony J. Ricci, Scott Stevenot | 2021-01-12 |